Materials Issues in Applications of Amorphous Silicon Technology:

Materials Issues in Applications of Amorphous Silicon Technology:

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.aodel reflects trends that are related to the chemistry of the constituent SI and Ge atoms, and as such we expect that refinements based on more ... (b) substrates are Introduced through a load lock arrangement; (c) the Si and Ge targets have been modified with: (1) a c-Si washer used as the aperture of the Si target front ground shield, and (10 a tubular structure used as the Ge target front ground shield;anbsp;...


Title:Materials Issues in Applications of Amorphous Silicon Technology:
Author: D. Adler, A. Madan, M. J. Thompson
Publisher:Cambridge University Press - 1985-08-30
ISBN-13:

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